System for Sputter and E-Beam Deposition

Our objective is to acquire a sputter and electron beam deposition system (will be referred to as The Suite hereafter) for metal and dielectric thin film (< 1 µm) deposition. The Suite will be located in a class 10000 cleanroom space and will operate continuously for film deposition, typically on semiconductor substrates, though other materials may be used. When installed, the dimensions of the equipment should not exceed 2.0 m x 3.0 m x 2.6 m (W x L x H, for W: width, L: length and H: height).