Cleanroom 3D Measurement Microscopy System

NPL wishes to procure a microscopy system with at least 1μm resolution for the automated dimensional metrology of 3D structures, wafers and wafer-scale devices. Automating the measurements of the device under test (DUT) will require homing in on recognisable features for positioning under the microscope for optical scanning of 3D geometries as well as repeated localised contactless surface roughness measurements. This will require 3D linear translation and rotation of the DUT. The system must be suitable for use in ISO 7 cleanrooms. Participation is via the London Universities eSourcing…